| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2027-0178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2027-0174 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0944 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-01 |
| filingDate |
2018-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_958eb48355e64187589380ce75439007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2e9c928aa402e93c23e8cfe7082b3cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78e08906f4cf6a1a02c756f43948f2c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2d2526adcf8f472523593e992175c07 |
| publicationDate |
2021-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10935799-B2 |
| titleOfInvention |
Optical component having depth modulated angled gratings and method of formation |
| abstract |
A method of forming an optical grating component. The method may include providing a substrate, the substrate comprising an underlayer and a hard mask layer, disposed on the underlayer. The method may include patterning the hard mask layer to define a grating field and etching the underlayer within the grating field to define a variable height of the underlayer along a first direction, the first direction being parallel to a plane of the substrate. The method may include forming an optical grating within the grating field using an angled ion etch, the optical grating comprising a plurality of angled structures, disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the substrate, wherein the plurality of angled structures define a variable depth along the first direction, based upon the variable height of the underlayer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4258298-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4257723-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11226556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11614685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11662524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11404278-B2 |
| priorityDate |
2018-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |