Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80948 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80896 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80895 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-8001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-75314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-75304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-75305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08145 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-185 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-00 |
filingDate |
2020-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2021-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65ae8b2d454153d7a8e30b32fb055c95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4096c4c3172fa6932978341541909aef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad3fbb69c8a6e2361fffed0116fdd096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e61ea9d8f12437fa7d467104cf73e20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1afbfed8260ea42ee75a8ffebadaa99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0578f0f3ea24fd16e64332d0ed7b0a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a20c047dddf061194ac094c805238ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_106f8d0bbd4dd0a4be2a7125bd28818e |
publicationDate |
2021-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10923452-B2 |
titleOfInvention |
Substrate bonding apparatus |
abstract |
A substrate bonding apparatus for bonding a first substrate to a second substrate includes: a first bonding chuck including: a first base; a first deformable plate provided on the first base to support the first substrate; and a first pneumatic adjustor configured to deform the first deformable plate by adjusting a first pressure in a first cavity formed between the first deformable plate and the first base; and a second bonding chuck including: a second base; a second deformable plate provided on the second base to support the second substrate; and a second pneumatic adjustor configured to deform the second deformable plate by adjusting a second pressure in a second cavity formed between the second deformable plate and the second base. The first deformable plate is deformed such that a first distance between the first base and the first deformable plate is varied based on the first pressure, and the second deformable plate is deformed such that a second distance between the second base the second deformable plate is varied based on the second pressure. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023032570-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021358879-A1 |
priorityDate |
2019-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |