| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9daca98ac07d1c93234d13f7306addb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2017-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e138bb85f887329b1887ffac3732624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d95c0811148827f1d6e4e631a196ed2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0875e4068bce34ddfb7fab5def3fc063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0be76b5d81410bd585fe3aa94b610173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa84d09016417348972fd2c2b2f31e07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2348ec29240d3594496cbd70d3098a1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8ac86b6d033aa9d03cd0762e897bebf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df05397483072e303034bfe007868393 |
| publicationDate |
2021-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10913755-B2 |
| titleOfInvention |
Transition metal compound, preparation method therefor, and composition for depositing transition metal-containing thin film, containing same |
| abstract |
The present invention relates to: a novel transition metal compound; a preparation method therefor; a composition for depositing a transition metal-containing thin film, containing the same; a transition metal-containing thin film using the composition for depositing a transition metal-containing thin film; and a method for preparing a transition metal-containing thin film. The transition metal compound of the present invention has high thermal stability, high volatility, and high storage stability, and thus a transition metal-containing thin film having high-density and high-purity can be easily prepared by using the same as a precursor. |
| priorityDate |
2016-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |