| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e91c3f24b5146f88cc476d5eec4ee48a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q10-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2258
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-04 |
| filingDate |
2020-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dacd0577a6f2bed33fb396db2d10de5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85bc03903eb9d76173c14f6f4d95d6df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05e2c93b5dca0da051936bfe628d6dfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_564e2a320957ea0b9c74ae50f9be5df7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09e4dfa6a68e2735462cb9ae701875e3 |
| publicationDate |
2021-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10910208-B2 |
| titleOfInvention |
Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry |
| abstract |
Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA). |
| priorityDate |
2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |