| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13c11160cdfd337768026806b94febf6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 |
| filingDate |
2017-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eca75fa221128a0626b889cd7b96d4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb712321e348ed531c25ae96ff9bba29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bab1c5aed4aa1b0bbeca16070d34bca3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad1480e1ca9983f0c0d2436922488f3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b851788e9b2d2c4476b41662a2d672ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5104e78c9774470bcdffa9d9bfc53d41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d249cd82b136aaf29b020442b78da7a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba522acba07bcabd5d18d8d6087012e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b893ba37e9ed2cfb774d797755e30d68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_365956e4b5fa1ce99076c7a9d2e1e817 |
| publicationDate |
2020-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10879120-B2 |
| titleOfInvention |
Self aligned via and method for fabricating the same |
| abstract |
A self aligned via and a method for fabricated a semiconductor device using a double-trench constrained self alignment process to form the via. The method includes forming a first trench and depositing a first metal into the first trench. Afterwards, the process includes depositing a dielectric layer over the first metal such that a top surface of the dielectric layer is at substantially the same level as the top surface of the first trench. Next, a second trench is formed and a via is formed by etching the portion of the dielectric layer exposed by the overlapping region between the first trench and the second trench. The via exposes a portion of the first metal and a second metal is deposited into the second trench such that the second metal is electrically coupled to the first metal. |
| priorityDate |
2016-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |