http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10859439-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e85662883ee11f4790be9874238ffa65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0289 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J4-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21 |
| filingDate | 2016-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0f815bce655de5808e638e361b66e36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d058ca5c3a60593b3c63c97e67a6476 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5ac1b5b83f6a019f30ef5b585ab9ff8 |
| publicationDate | 2020-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-10859439-B1 |
| titleOfInvention | Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone error |
| abstract | An imaging system, and method of its use, for viewing a sample surface at an inclined angle, preferably in functional combination with a sample investigating reflectometer, spectrophotometer, ellipsometer or polarimeter system; wherein the imaging system provides that a sample surface and multi-element imaging detector surface are oriented with respect to one another to meet the Scheimpflug condition, and wherein a telecentric lens system is simultaneously positioned between the sample surface and the input surface of the multi-element imaging detector such that an image of the sample surface produced by said multi-element imaging detector is both substantially in focus over the extent thereof, and such that substantially no keystone error is demonstrated in said image. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023028172-A1 |
| priorityDate | 2012-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.