| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5157cc9d29989d27bd65a85902ddb054 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-1708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-1704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0427 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3151
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-1702 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 |
| filingDate |
2019-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b1868f89c942fdedf668a7298ff81b1 |
| publicationDate |
2020-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10852227-B2 |
| titleOfInvention |
Apparatus for and method of sensing fluorine concentration |
| abstract |
Disclosed is an apparatus for and method of measuring the concentration of F2 in the laser gas used in an excimer laser. Quartz Enhanced Photoacoustic Spectroscopy is used to obtain a direct measurement of F2 concentration quickly and using only a small sample volume. |
| priorityDate |
2017-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |