Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0f3034f877d959ebb214ad10d763c44 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8848 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-303 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02 |
filingDate |
2018-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2020-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9352448b3ee1dc10712cb15eb25e638 |
publicationDate |
2020-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10830709-B2 |
titleOfInvention |
Interferometer with pixelated phase shift mask |
abstract |
An interferometer uses a phase shift mask that includes an array of pixels that are aligned with a corresponding array of pixels of a detector. Each pixel in the phase shift mask is adapted to produce one of a number of predetermined phase shifts between a test beam and a reference beam. For example, the pixels may be linear polarizers or phase delay elements having one of the number of polarizer orientations or phase delays to produce the predetermined phase shifts between the test beam and the reference beam. The pixels in the phase shift mask are arranged in the array to include each of the predetermined phase shifts in repeating pixel groups in rows that are one column wide, columns that are one row high, or blocks of multiple rows and columns. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11719531-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11150195-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022018649-A1 |
priorityDate |
2018-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |