| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20084 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 |
| filingDate |
2019-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4a2b8940dd1944abcb7630fce333d1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1871c24c735f73a5d430f18ada478b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80c460e2b8665b09db9ed3458eaf5bf1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1274d823db6538842a15bc08e9c73430 |
| publicationDate |
2020-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10818001-B2 |
| titleOfInvention |
Using stochastic failure metrics in semiconductor manufacturing |
| abstract |
A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021342994-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11398367-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11398366-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11301977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11669957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094057-B2 |
| priorityDate |
2018-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |