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publicationDate 2020-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10785865-B2
titleOfInvention Interconnect structure and method of manufacturing the same
abstract A method for manufacturing an interconnect structure is provided. The method includes the following steps. An opening is through a substrate. A low-k dielectric block is formed in the opening. At least one first via is formed through the low-k dielectric block. A first conductor is formed in the first via.
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