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filingDate 2018-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1fb68b2057511dccbdfcf39c64670e8
publicationDate 2020-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10777666-B2
titleOfInvention Manufacturing method of thin film transistor substrate and thin film transistor substrate manufactured by using the same
abstract A manufacturing method of a thin film transistor substrate and the thin film transistor substrate manufactured by using the manufacturing method are provided. The manufacturing method includes: providing a substrate layer, forming a gate electrode layer on the substrate layer, forming an insulating layer on the substrate layer and the gate electrode layer by using a first solution, forming a channel layer on the insulating layer by using a second solution, and forming a source/drain electrode layer on the insulating layer. The insulating layer and the channel layer are formed by processes using solution, so high vacuum equipment is not required, and production costs are reduced.
priorityDate 2018-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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