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filingDate 2018-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_891d3e84df1128a1cdfaacb5da0c59b4
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publicationDate 2020-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10723916-B2
titleOfInvention Organic film CMP slurry composition and polishing method using same
abstract The present invention relates to an organic film CMP slurry composition for polishing an organic film, which includes at least either of a polar solvent or a non-polar solvent and a metal oxide abrasive, is acidic, and has a carbon content of around 50 to 95 atm %, and a polishing method using the same.
priorityDate 2013-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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