http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10711227-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3773
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
filingDate 2018-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f099e8f892654eb58bf2ce65804b14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e422e911766749fa20099c2c762c4a78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7067760fcdd12d949e5521826a7d3b07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_222411a00e1067f1d0ec592730a46250
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f32c8d7e76bc81279526a3fad47a7faf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_506ca85b4ecaa2a6ce9e6c87f0a8d365
publicationDate 2020-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10711227-B2
titleOfInvention TiN hard mask and etch residue removal
abstract Composition, method and system for PVD TiN hard mask removal from 28/20 nm pattern wafers have been disclosed. The composition uses peroxide as oxidizing agent for PVD TiN hard mask removal under slightly basic conditions. The composition comprises bulky or long chain organic amines or polyalkylamine to improve removal/etching selectivity of PVD TiN vs CVD TiN. The composition further comprises long chain organic acids or amines to maintain Co compatibility.
priorityDate 2015-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016200975-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002077259-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016130500-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014093407-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9976111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011147341-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006226122-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013101907-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015054464-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016186058-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013101907-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0233033-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015053800-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009131295-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013157472-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006110279-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016032186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012058644-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013045908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7928046-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015054460-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7922824-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226581842
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531062
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9257
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579089
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226417604
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453327643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID165228
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452826178
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419534805
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454401973
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226531765
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486281
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21863527
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226515674
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54670067
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226515675
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457521308
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558806
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11487
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448021919
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554224
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451414416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449185545
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID549976
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31347
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486558
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474445
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227312884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521617
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454641732
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID176
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396824
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419769253
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21275334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410389413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539309
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID30111
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8143
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508302
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21966993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417109324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413555
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452561564
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10290827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID867
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425914843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73844
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423055
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID363212
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67803
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596776
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412753460
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID363212
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550106
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411738766
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448868360
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410065
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33032
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450408979
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226429854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID712373
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226513657
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66894056
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226424664
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406187
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54676860
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415822339
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID167786
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517524
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487901
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID498427
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21218424
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226540663
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID319829874
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID750
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226540755
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414866661
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75897
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410534197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451203358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420125
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8102
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15914
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447827115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226575642
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451454455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420546713
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453148806
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19911768
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18769481
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393724
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7582
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24538
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415713474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903350
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394442
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62648
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21896100
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID523077
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400006
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406401
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9548686
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86197066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723671
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393518
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406295
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1068
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11609904
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25484
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415823743
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8897
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226421792
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1048
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408295384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452434431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21896097
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6435836
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419507743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8916
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID196
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226421791
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393346
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474234
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226503871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422232
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409911
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25423
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422161
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962

Total number of triples: 271.