| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F15-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F15-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 |
| filingDate |
2017-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d531b86da9bcf189fabfdf35d9c52bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3d83f1c297a912e2299dc09717a0ae9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_614270e5163e2d6dd97e5de5cff63435 |
| publicationDate |
2020-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10692227-B2 |
| titleOfInvention |
Determination of sampling maps for alignment measurements based on reduction of out of specification points |
| abstract |
A system for determining a sample map for alignment measurements includes a metrology tool and a controller. The controller defines a full sampling map including a plurality of measurement locations. The controller directs the metrology tool to measure alignment at each measurement location of the full sampling map for a plurality of samples to generate a reference alignment dataset, generates candidate sampling maps, each being a subset of the full sampling map. The controller may further estimate alignment as a function of location based on the two or more candidate sampling maps at each measurement location of the full sampling map, and determine a working sampling map by comparing the estimated alignment to the reference alignment dataset and selecting the candidate sampling map having a smallest number of alignment estimates exceeding a selected tolerance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11209737-B1 |
| priorityDate |
2017-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |