http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10670547-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2016-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69e8bbe11894ceb709e7534b95807479 |
| publicationDate | 2020-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-10670547-B2 |
| titleOfInvention | Nanostructured nickel oxide environmental sensor device and a package for encapsulating the device |
| abstract | A nanostructured environmental sensor includes a silicon based substrate, a structural base located above the substrate, and a sensor portion suspended above the structural base. A top surface of the sensor portion is formed from nickel oxide using atomic layer deposition. The nanostructured thin film nickel oxide environmental sensor is provided in a housing to form an environmental sensor package for sensing attributes of the environment to which the environmental sensor package is exposed. |
| priorityDate | 2015-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.