| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f5a8a983d88f296117dcc92946ab4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2016-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_862edc3f69d498a3f83c04663211a1e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3322ec7d4741e11d8e8443bbd4e5075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05edf50550896359652593b482f3d76a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9a2d19daef3945566a46b2c15641d39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3130cd65c0d37c8115c0f3eb893b3c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b4daa506b680de52b0421019d991b23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6894970c5609b6e9d667f835956c237f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_589be443b01dac48663aaccd52afd55a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80473d2e565e3482262d9b4d5a113618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de6c3e5ffb65ecc1b82d8f6351e8572b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8565cd1563e1d99d4680f2a45cf2816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e3828bd7255c9c108372be6d27b1127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72530521e9a46ce2654ad0b7f551975f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_745ca6bd55e8207d06dfc408cf06762b |
| publicationDate |
2020-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10663863-B2 |
| titleOfInvention |
Method of producing layer structure, and method of forming patterns |
| abstract |
A method of producing a layer structure and a method of forming a pattern, the method of producing a layer structure including coating a first composition on a substrate that has a pattern thereon; curing the coated first composition to form a first organic layer; applying a liquid material to the first organic layer to remove a part of the first organic layer; and coating a second composition on remaining parts of the first organic layer; and curing the coated second composition on the remaining parts of the first organic layer to form a second organic layer: wherein the first composition and the second composition each independently include a solvent, and a polymer including a structural unit represented by Chemical Formula 1,n n* A 1 -B 1 *. [Chemical Formula 1] |
| priorityDate |
2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |