| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30416
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-063 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| filingDate |
2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c75a6dbb2d78479d4063e316f92052e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fca3b9831b8deab7c57490952c89f5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8b4902db12afb6cdbc1b18e1c65023e |
| publicationDate |
2020-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10636620-B2 |
| titleOfInvention |
Charged particle beam device and control method of charged particle beam device |
| abstract |
By switching between a plurality of image transfer units based on a state of a stage and using the switched image transfer unit, traceability of stage movement and tolerance to communication failure can be improved. A first image transfer protocol is a protocol of which reliability is higher than reliability of a second image transfer protocol, and a switch unit may select a first image transfer unit in a case where it is determined that a state of a stage is a state in which the stage is stopping. A second image transfer unit is a protocol of which a transfer speed is higher than a transfer speed of the first image transfer protocol, and the switch unit may select the second image transfer unit in a case where it is determined that the state of the stage is a state in which the stage is moving. |
| priorityDate |
2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |