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filingDate 2019-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73c34cfcfcd777aab99ba0e3b5c10793
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43f08d83950e1600c66fe62483a97b01
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publicationDate 2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10619076-B2
titleOfInvention Self-stopping polishing composition and method for bulk oxide planarization
abstract The invention provides a chemical-mechanical polishing composition comprising an abrasive, a self-stopping agent, an aqueous carrier, and optionally, a cationic polymer, and provides a method suitable for polishing a substrate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020190361-A1
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type http://data.epo.org/linked-data/def/patent/Publication

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