http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10618079-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82a9e22a923eca64a02a97f0dfb493ed |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-10513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4494 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0603 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0622 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00 |
| filingDate | 2017-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c7ca6f0dd9da14b182153ab1c9ee822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1884c42d6cd73780d814e49002025f2d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34323565f06617cad056c44ee62e2102 |
| publicationDate | 2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-10618079-B2 |
| titleOfInvention | Piezoelectric micromechanical ultrasonic transducers and transducer arrays |
| abstract | An apparatus may include one or more segmented piezoelectric micromechanical ultrasonic transducer (PMUT) elements. Each segmented PMUT element may include a substrate, an anchor structure disposed on the substrate and a membrane disposed proximate the anchor structure. The membrane may include a piezoelectric layer stack and a mechanical layer. The anchor structure may include boundary portions that divide the segmented PMUT element into segments. Each segment may have a corresponding segment cavity. The boundary portions may correspond to nodal lines of the entire membrane. The membrane may include a membrane segment disposed proximate each segment cavity. The membrane may be configured to undergo one or both of flexural motion and vibration when the segmented PMUT element receives or transmits signals. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11134334-B2 |
| priorityDate | 2016-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.