| abstract |
A method and structure to isolate BEOL MIM capacitors shorted or rendered highly leaky due to in process, or service induced defects, in a semiconductor chip are provided such that the rejection and loss of yield of otherwise good chips is minimized. In one embodiment, the method incorporates an isolation element such as, for example, a fuse, or a phase change material such as, a metal/insulation transition metal material, in series between the MIM capacitor and the active circuit. When a high current passes through the element due to the MIM capacitor being defective, the isolation element is rendered highly resistive or electrically open thereby disconnecting the defective capacitor or electrode plate from the active circuitry. |