| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-0285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-125 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-398
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0478
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0496
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-685 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-296 |
| filingDate |
2017-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_663ce9f5a9fa30260e931f3b7c2d8bfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb0857bddb4a68cab961ecd3af9701d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ceccab1ac4d8d3700908a7e77ac574f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_273068dfa2dac1dc4634bf78b89da275 |
| publicationDate |
2020-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10610117-B2 |
| titleOfInvention |
Flexible silicon nanowire electrode |
| abstract |
A method is presented for forming a nanowire electrode. The method includes forming a plurality of nanowires over a first substrate, depositing a conducting layer over the plurality of nanowires, forming solder bumps and electrical interconnections over a second flexible substrate, and integrating nanowire electrode arrays to the second flexible substrate. The plurality of nanowires are silicon (Si) nanowires, the Si nanowires used as probes to penetrate skin of a subject to achieve electrical biopotential signals. The plurality of nanowires are formed over the first substrate by metal-assisted chemical etching. |
| priorityDate |
2017-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |