| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2255 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-36 |
| filingDate |
2016-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1ce41f60f2c6de5c483e7fcd6462827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ea40c4641618452114ecc29a954e3a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad259d931187976b4b179553e3cac676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95562d37a7afb3415d7b20ba194afad3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6fd0bdfa2a97602284f6bbe919897e |
| publicationDate |
2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10593552-B2 |
| titleOfInvention |
Method for doping semiconductor substrates by means of a co-diffusion process and doped semiconductor substrate produced by means of said method |
| abstract |
The invention relates to a method for doping semiconductor substrates by means of a co-diffusion process. First, semiconductor substrates are coated at least on one side with a layer containing at least one first dopant. Two of said substrates in each case are arranged in a process chamber in such a way that two of the coated sides thereof are brought in direct contact. |
| priorityDate |
2015-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |