| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9e458d61fdff5d3d10cda2ada3dc2824
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa6e4421d9e1159b6012d9bf702be572 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F19-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F13-00 |
| filingDate |
2019-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_955eaa513b43c314757871a10e6f7a20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86f554c92b919d344c1c07fa7874da88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a27e64cf90a3b2bfe20cddc4529f1155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac07f049795feeb38f537d7d88df4336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7485a460432eebc3c9e48b2be602f2f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4b1df2b764934ee8d5cbaf70807461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_268b08b32ec2357a18f20568f1baf111 |
| publicationDate |
2020-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10526698-B2 |
| titleOfInvention |
Chemical deposition raw material including heterogeneous polynuclear complex and chemical deposition method using the chemical deposition raw material |
| abstract |
The present invention relates to a chemical deposition raw material including a heterogeneous polynuclear complex in which a cyclopentadienyl and a carbonyl are coordinated to a first transition metal and a second transition metal as central metals, the chemical deposition raw material being represented by the following formula. In the following formula, the first transition metal (M 1 ) and the second transition metal (M 2 ) are mutually different. The number of cyclopentadienyls (L) is 1 or more and 2 or less, and to the cyclopentadienyl is coordinated one of a hydrogen atom and an alkyl group with a carbon number of 1 or more and 5 or less as each of substituents R 1 to R 5 . With the chemical deposition raw material of the present invention, a composite metal thin film or a composite metal compound thin film containing plural metals can be formed from a single raw material. |
| priorityDate |
2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |