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publicationDate 2019-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10458858-B1
titleOfInvention Micromachined thermistor
abstract A micromachined apparatus includes micromachined thermistor having first and second ends physically and thermally coupled to a substrate via first and second anchor structures to enable a temperature-dependent resistance of the micromachined thermistor to vary according to a time-varying temperature of the substrate. The micromachined thermistor has a length, from the first end to the second end, greater than a linear distance between the first and second anchor structures.
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