| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e41651508566f0385833e1ba14a21ffd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0636 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4148 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
| filingDate |
2017-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbd912273c234e900171816b31dc6c35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d07cb40ed82f6fb0567d0df9200c01de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf36a2013e5ca17e589a906b520c993 |
| publicationDate |
2019-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10386328-B2 |
| titleOfInvention |
Chemical sensor with air via |
| abstract |
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor. |
| priorityDate |
2016-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |