Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c2d1b17808513c2549c0ab26f24078d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6409e25ad5decbd043ed7439fbf842ed |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-027 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02574 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-072 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02275 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-312 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 |
filingDate |
2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2019-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f2995f05c1ed9746fbefb7ddfb0379 |
publicationDate |
2019-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10374573-B2 |
titleOfInvention |
Plate wave devices with wave confinement structures and fabrication methods |
abstract |
A micro-electrical-mechanical system (MEMS) guided wave device includes a single crystal piezoelectric layer and at least one guided wave confinement structure configured to confine a laterally excited wave in the single crystal piezoelectric layer. A bonded interface is provided between the single crystal piezoelectric layer and at least one underlying layer. A multi-frequency device includes first and second groups of electrodes arranged on or in different thickness regions of a single crystal piezoelectric layer, with at least one guided wave confinement structure. Segments of a segmented piezoelectric layer and a segmented layer of electrodes are substantially registered in a device including at least one guided wave confinement structure. |
priorityDate |
2014-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |