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filingDate 2017-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94bc5abc3b7576af27b914019b71d0f6
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publicationDate 2019-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10366886-B2
titleOfInvention Pattern forming method, self-organization material, and method of manufacturing semiconductor apparatus
abstract According to one embodiment, a pattern forming method includes supplying, onto an under layer, a self-organization material including a block copolymer which includes a first polymer and a second polymer, and a third polymer having a molecular structure with oxygen attached to a cyclic structure, wherein the third polymer is bonded to the first polymer, and phase-separating the block copolymer to form a phase-separation pattern on the under layer.
priorityDate 2016-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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