| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95615
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-41875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06K9-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B19-418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 |
| filingDate |
2016-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afa17fa2831860fa9c978af5f362857a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ab14a9887aabad4d3b72e2e36a1348a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a22f04b04b5742952eac77e4b3610613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1274d823db6538842a15bc08e9c73430 |
| publicationDate |
2019-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10359371-B2 |
| titleOfInvention |
Determining one or more characteristics of a pattern of interest on a specimen |
| abstract |
Methods and systems for determining characteristic(s) of patterns of interest (POIs) are provided. One system is configured to acquire output of an inspection system generated at the POI instances without detecting defects at the POI instances. The output is then used to generate a selection of the POI instances. The system then acquires output from an output acquisition subsystem for the selected POI instances. The system also determines characteristic(s) of the POI using the output acquired from the output acquisition subsystem. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11790515-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11379972-B2 |
| priorityDate |
2015-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |