| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb7dcd0649b6f9512be2ce50eb42d21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0061 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate |
2017-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e41b7643e1b73fade9e3690114562e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd9ea72a610b20a6a68081486fe743c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44ffdb275c19899fb4f6e6483868f71d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81cdb01fd243bb73ddc855c0ba44dfa7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9519e9f7bbbf6d09939d0e3997e8268 |
| publicationDate |
2019-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10349188-B2 |
| titleOfInvention |
MEMS microphone system and method |
| abstract |
A Microelectromechanical system (MEMS) microphone comprises a base unit and a driving system disposed on the base unit. The driving system comprises a first diaphragm, a second diaphragm spaced apart from the first diaphragm, and a comb finger counter electrode assembly comprising a moving electrode member, the counter electrode assembly is mechanically coupled to the first and second diaphragms. The driving system further comprises a side wall mechanically coupled the first diaphragm to the second diaphragm defining a sealed electrode region and the sealed electrode region having an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11212601-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022377480-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10993044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11665494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020107136-A1 |
| priorityDate |
2017-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |