Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8321a4d88d3c45cbb4a9ebf4e9c07ec4 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38 |
filingDate |
2015-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6fe0743d04c7300c750b9b150bae118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d2f52d4a78b8b42915b19543b644117 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7180fbd8b34d5e1fc306938338bb56ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b840f485799a8736c25b5b707b7c8b52 |
publicationDate |
2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10294574-B2 |
titleOfInvention |
Levelers for copper deposition in microelectronics |
abstract |
A composition for electrolytic plating in microelectronics which contains a leveler that comprises the reaction product of an aliphatic di(t-amine) with an alkylating agent. Electrolytic plating methods employing the leveler, a method for making the leveler, and the leveler compound. |
priorityDate |
2014-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |