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filingDate 2016-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b9a3f84b3bc33d545e2ebf2755fa28
publicationDate 2019-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10263601-B2
titleOfInvention Tunable bulk acoustic resonator device with improved insertion loss
abstract A tunable BAW filter device operating in an allocated channel of a predetermined frequency band includes a voltage source and multiple BAW resonators. The voltage source selectively provides non-zero DC bias voltage based on a location of the allocated channel within the frequency band. Each BAW resonator has a resonance frequency, and includes a bottom electrode, a piezoelectric layer and a top electrode disposed over the piezoelectric layer, the top electrode being electrically connected to the voltage source via a resistor. The voltage source is activated, applying the non-zero DC bias voltage to the top electrode of each BAW resonator, when the location of the allocated channel is near an upper or lower corner of the frequency band. The resonance frequency of each BAW resonator is shifted in response to the non-zero DC bias voltage toward a center of the frequency band, improving insertion loss of the BAW filter device.
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