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publicationDate 2019-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10175266-B1
titleOfInvention Wafer level electrical probe system with multiple wavelength and intensity illumination capability system
abstract A wafer level electrical probe system with multiple wavelength and intensity illumination capability system that enables concurrent reliability studies of illumination stimulation, electrical stimulation, and the interplay of both electrical and illumination stimulation. The probe system includes five sub-systems: a controllable wavelength and intensity illumination input sub-system with two different configurations; a wafer level electrical probe sub-system; an illumination intensity calibration sub-system; an illumination delivery sub-system; and an illumination wavelength calibration sub-system.
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