| abstract |
The present disclosure provides a semiconductor structure, including a first silicon layer having a through silicon via (TSV), a III-V structure over the first silicon layer, electrically coupling to the TSV, and a redistribution layer (RDL) under the first silicon layer, electrically coupling to the TSV. The present disclosure also provides a method of manufacturing a semiconductor device. The method includes providing a III-V-on-Si structure, comprising a III-V device over a silicon layer, forming a through silicon via (TSV) in the silicon layer, electrically coupling to the III-V device, and forming a redistribution layer (RDL) over a side of the silicon layer opposite to the III-V device. |