http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10157867-B1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-09517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-8013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-06517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0603
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76837
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5386
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-50
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
filingDate 2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55f458d34199152a5f7337399f9f5b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_860b78915d0b9bee60a103ff33c71621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0149b1487a7c60450ebee9b93254e903
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da8e5f7279951e796b974189caeaa8a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8450984913fccbee4712a3d3dd7093e3
publicationDate 2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10157867-B1
titleOfInvention Interconnect structure and method
abstract In an embodiment, a device includes: an interconnect structure over a substrate, the interconnect structure including a first metal line and a second metal line, the first metal line longer than the second metal line; a surface dielectric layer over the interconnect structure; a plurality of first vias in the surface dielectric layer; a first bonding pad in the surface dielectric layer, where the first bonding pad is connected to a first end of the first metal line through the first vias; a plurality of second vias in the surface dielectric layer; a second bonding pad in the surface dielectric layer, the second bonding pad and the first bonding pad separate from each other, where the second bonding pad is connected to a second end of the first metal line through the second vias; and a third bonding pad in the surface dielectric layer, where the third bonding pad is connect to the second metal line through a third via.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664336-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022077116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10665581-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020175712-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11195810-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023020810-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682553-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11404534-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289422-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11621247-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021143006-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11373953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127728-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020154033-A1
priorityDate 2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9522822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6838774-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802504-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013256893-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9372206-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007050610-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9443783-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201542442-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9496189-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8803316-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82901
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545842
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170

Total number of triples: 83.