| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
2017-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bdee699d96792609bf442c596e57149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc40e73404d702ed8f09f797d8e5f699
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_319eb2ec42f463d0d0f5e7d0c16310a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7eaeced56dc0fd546792086051736aab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0531f91fda4b2fd5a50e30651b7864c4 |
| publicationDate |
2018-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10147612-B2 |
| titleOfInvention |
Metal pattern forming method |
| abstract |
A metal pattern forming method according to an embodiment includes forming a metal film on a surface of a substrate by an electroless plating method, the substrate including a first layer including a protrusion and a recess, and a film thickness of the metal film being a half or more of a width of the recess; and performing wet etching, the metal film in the recess removed by the wet etching and the metal film on the protrusion remained after the wet etching. |
| priorityDate |
2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |