http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10128185-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76852
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76892
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
filingDate 2017-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45016b15097b154b7d78976c9716e09b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f85a74846ab9a9ac1b23c108b5e0f584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d95eafa15f35c3d66e50db22eca5ca29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0757a82bc9b98937c7c6a877f82e77d
publicationDate 2018-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10128185-B2
titleOfInvention Hybrid subtractive etch/metal fill process for fabricating interconnects
abstract In one example, a method for fabricating an integrated circuit includes patterning a layer of a first conductive metal, via a subtractive etch process, to form a plurality of lines for connecting semiconductor devices on the integrated circuit. A large feature area is formed outside of the plurality of conductive lines via a metal fill process using a second conductive metal.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270913-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107731-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11302637-B2
priorityDate 2015-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005230834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014252629-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008265419-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015364415-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7400025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002177303-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8912041-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617982-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014252630-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11307515-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015380272-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012098133-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7553427-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009239369-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016093566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014127906-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009140431-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6620721-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015348903-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6445072-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009079080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053893-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015179831-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8679359-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6277745-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014021612-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002024117-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008081459-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID482532689
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160959
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451845207

Total number of triples: 92.