abstract |
A sensing sensor includes a first vibrating region, a second vibrating region, an adsorbing film, a blocking layer, a wiring board, a channel forming member arranged to cover a region of the one surface side of the wiring board to form a channel. The adsorbing film is arranged such that the adsorbing film is located in a region including the central portion in the front-rear direction of the one vibrating region. Assuming that the front end portion of the vibrating region is P 1 , the front end portion of the adsorbing film is P 2 , and the central portion of the vibrating region is C, the front end portion of the adsorbing film P 2 satisfies a relational expression expressed as follows: (a distance from C to P 1 )×0.4≤(a distance from P 1 to P 2 )≤(a distance from C to P 1 )×0.8. |