Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41N2210-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41N2210-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-10 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41F3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41N10-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41F17-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41F17-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41N10-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41F3-46 |
filingDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b81fe4b6f365fbca017fb6abb77e428f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e2175c9219bbc793c8dde3f525f64c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229d6db203ac0e1ae7b892d2442f1bfc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec96f9d08c379c7e01d802eefc51ca10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e09485f7c1907393b48938dc7b6d297 |
publicationDate |
2018-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10121861-B2 |
titleOfInvention |
Nanowire transistor fabrication with hardmask layers |
abstract |
A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019229186-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10522621-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10546942-B2 |
priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |