http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10108005-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7af673589ca45d2fd8b9ea902cdbd1dc |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0858 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0078 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
filingDate | 2015-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07388d6bbb8d7f4e3704df0f16b9f3a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e0a9c172135283e1317cbbdf436ab91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65509e96a40da0e5bd3ec9f3df742e52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61a4315d5484924fa7eaea93b51777e9 |
publicationDate | 2018-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-10108005-B2 |
titleOfInvention | Optical scanner having a variable focus mirror |
abstract | An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed. |
priorityDate | 2014-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.