Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4916 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7855 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76865 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823437 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0207 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 |
filingDate |
2016-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ea10da0bf1d4d3d712b28ae38b29fd6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad17a53f9778fc14c1d304d5a07dd67b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdf14936d80b395dfbb9379f9aba7ded http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c25684e7949f1779ff2f5726d4ba2fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e9587a92475dd193265ee26ba6b1b95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85dbf98ccd82e86281c191fa94d10076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c086bbfde3730927f8473109354e8fb7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d83f3d26420c724e3d8150be8e5dab5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89ac37a15b41608ebd73df1a47d3b489 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31ac51a6dd55bde39922d66ed84a91dc |
publicationDate |
2018-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10096522-B2 |
titleOfInvention |
Dummy MOL removal for performance enhancement |
abstract |
The present disclosure relates to a method of forming an integrated chip having middle-of-the-line (MOL) structures arranged at an irregular pitch, and an associated method of formation. In some embodiments, the integrated chip has a well region with a plurality of source/drain regions. A plurality of gate structures are arranged over the well region at a regular pitch. A plurality of middle-of-the-line (MOL) structures are laterally interleaved between some of the plurality of gate structures and are arranged over the well region at an irregular pitch having a first pitch that is larger than the regular pitch. Since the MOL structures have an irregular pitch with a first pitch that is larger than the regular pitch, one or more of the plurality of gate structures are spaced apart from a closest gate or MOL structure by a space that reduces parasitic capacitance. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043426-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10784168-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600860-B2 |
priorityDate |
2016-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |