| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_30522bcb130bc7347da15109d4c37745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a580214d57cc490be450a032d35e21b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5477a5b8f0d43d74a47de5ef087ea8eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3155069b833b184bcd4ad12f7100dd4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_984f9fc777e14dc507a945377a5b2fce |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-24 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 |
| filingDate |
2007-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14e3554ff63cac46b647e6e4187d59a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01b0b00741299ace757d4a8cbe27baa2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ababafb6cead87cf79ee549998e3b3a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_194d3683c7e4e17b156adb6b4b592ac4 |
| publicationDate |
2018-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10092927-B2 |
| titleOfInvention |
Molecular layer deposition process for making organic or organic-inorganic polymers |
| abstract |
Ultrathin layers of organic polymers or organic-inorganic hybrid polymers are deposited onto a substrate using molecular layer deposition methods. The process uses vapor phase materials which contain a first functional group and react only monofunctionally at the surface to add a unit to the polymer chain. The vapor phase reactant in addition has a second functional group, which is different from the first functional group, or a blocked, masked or protected functional group, or else has a precursor to such a functional group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11535958-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3772545-A1 |
| priorityDate |
2006-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |