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filingDate 2017-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10083907-B2
titleOfInvention Method and structure for forming on-chip anti-fuse with reduced breakdown voltage
abstract A fully depleted field effect transistor (FET) and an anti-fuse structure are provided on a same chip. The fully depleted FET and the anti-fuse structure share a same high dielectric (k) constant dielectric material. The anti-fuse structure contains a faceted epitaxial doped semiconductor material as a bottom electrode, a high k dielectric material portion, and a gate electrode material portion as a top electrode. The sharp corners of the faceted epitaxial doped semiconductor material cause electric field concentration, which aid in the reduction of the breakdown voltage of the anti-fuse structure.
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