| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23a4e0c875bf1ac2b8a3b76517de6c7d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-06333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20221 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3177 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-06 |
| filingDate |
2016-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51d71ef60ee0f2e1c5285fa28a26b9fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51ed54fbc85a9e44b7fd493cffa3bf6b |
| publicationDate |
2018-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10074509-B2 |
| titleOfInvention |
Plasmon-excited electron beam array for complementary patterning |
| abstract |
A system for generating an electron beam array, comprising a light source, a first substrate having a plurality of plasmonic lenses mounted thereon, the plasmonic lenses configured to received light from the light source and produce an electron emission, and a plurality of electrostatic microlenses configured to focus the electron emissions into a beam for focusing on a wafer substrate. A light source modulator and digital micro mirror may be included which captures light from the light source and projects light beamlets on the plasmonic lenses. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019019648-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10861668-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495428-B2 |
| priorityDate |
2015-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |