| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b6caea61bfde8a45e01a8deabff80d97 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11524
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1157
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11582
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11524
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11582
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-1157
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6783d763a9672ca504f7eabd16f56f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2299a025a2aed6b0c65d5bff46b62bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2442f78fc9835ecdbe086c06c1676c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acee2aedae65067a83d2fc1bac774d00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c02572981ba2bfb0272532e9bee3d429
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b11f3e7bd60c87e29aac63bde05c090e |
| publicationDate |
2018-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10050054-B2 |
| titleOfInvention |
Three-dimensional memory device having drain select level isolation structure and method of making thereof |
| abstract |
A layer stack including an alternating stack of insulating layers and sacrificial material layers is formed over a substrate. After formation of memory stack structures, backside trenches are formed through the layer stack. The sacrificial material layers are replaced with electrically conductive layers. Drain select level dielectric isolation structures are formed through drain select level of the stack after formation of the electrically conductive layers. The drain select level dielectric isolation structures laterally separate portions of conductive layers that are employed as drain select level gate electrodes for the memory stack structures. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10756110-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11552094-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741576-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11271007-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11605589-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11183512-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020209913-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11716850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10290648-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094712-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020203365-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019221574-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022220897-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251191-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I791131-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10546870-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11765897-B2 |
| priorityDate |
2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |