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publicationDate 2018-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10048584-B2
titleOfInvention Thinner composition
abstract A thinner composition includes propyleneglycol alkylether acetate, cycloketone, and methyl 2-hydroxy isobutyrate. The thinner composition has excellent EBR, RRC, and rework properties, as well as effects of improving photoresist application uniformity, and in particular, exhibiting excellent solubility to photoresist having a high polarity, so as to be applicable to various photoresists.
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