| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2017-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_966649a54fd99d9fe4b7947d42b7b07b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b16292891b398a2da79b57a8674d4c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89dde69aec1e80f849896121dd1e25d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d44de651f1379ed113a33d88247715fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46eecc6e6b140ee72b196e720cfd6a64 |
| publicationDate |
2018-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10037927-B2 |
| titleOfInvention |
Semiconductor structure, testing and fabricating method thereof |
| abstract |
A method of fabricating a semiconductor structure includes forming first and second features in a scribe region of a semiconductor substrate in which the first and second features are electrically isolated from each other; forming an interlayer dielectric layer over the first and second features; and forming a first contact in the interlayer dielectric layer and connected to the first feature and a second contact in the interlayer dielectric layer and connected to the second feature. |
| priorityDate |
2016-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |