| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b92609c425eaed9bfd02bb7a3a168c5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-202 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1474 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61N5-00 |
| filingDate |
2016-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f6b0668618bbae231235ebdeda902b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cbe510fcd3068536c4fe65d0d5fc937
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2292c9f11e6bfe5e1f187087ad36c7aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8be6b32d92f94f89629f47d2b4bfaf59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae390ff6196ebf1fd0301ec1b9f59eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9d91547552a3670b81c5b271b580b40 |
| publicationDate |
2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10014157-B2 |
| titleOfInvention |
Method for acquiring image and ion beam apparatus |
| abstract |
A method for acquiring an image, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes performing an equal-width scan of the ion beam in a first direction that obliquely intersects the linear edge and sweep in a second direction intersecting the first direction. The ion beam is sequentially scanned in different patterns on different scan regions of parallelogram shape, each of which includes the image acquiring region. Secondary charged particles are detected to generate image data of all the scan regions, and image data of the scan regions are calculated to generate image data of the image acquiring region. The image data of the image acquiring region are synthesized to display the image data of the image acquiring region. |
| priorityDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |