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filingDate 2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10006885-B2
titleOfInvention QCM sensor and method of manufacturing the same
abstract In a QCM sensor and a method of manufacturing the same, the QCM sensor includes: a quartz plate; and an electrode provided on one and the other principal surfaces of the quartz plate, in which the electrode is provided with a pattern having a contour line in a planar view of the electrode.
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