| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_238ecbd45449c7be2e7ec64d87978b82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0272d70c9ba3abebfdf08dc6b96f1120 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22 |
| filingDate |
2014-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7df728af27aa4736c691113feace3f09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7416a3f070a21005a63f6dd9823f0c6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09f2e20cef66be9737e1312d26ab08a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78cdb6af09978bf3d72c2c875767331d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9231b21a4616de6da4c330389476b60a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eb140869366aca5f93285c9a106df0c |
| publicationDate |
2018-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10001700-B2 |
| titleOfInvention |
Pellicle film including graphite-containing thin film for extreme ultraviolet lithography |
| abstract |
A pellicle film for extreme ultraviolet (EUV) lithography includes a graphite-containing thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10394117-B2 |
| priorityDate |
2013-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |