http://rdf.ncbi.nlm.nih.gov/pubchem/patent/UA-86943-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_87b0e97c4c6f5b52037c4ee46d1ec251 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate | 2013-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2470941a6a866759d593826d303a991e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22878cffebe5fd3c807349fb14268050 |
| publicationDate | 2014-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | UA-86943-U |
| titleOfInvention | DEVICE FOR PRODUCING MULTICOMPONENT AND MULTI-LAYER COATINGS |
| abstract | A device for forming multicomponent and multilayer coatings contains a technological vacuum chamber with a plasma-arc source and a gas plasma source, a holder with a substrate located axisymmetrically to the gas plasma source, a system for the inlet and control of process gases, power sources and pumping means. Plasma-arc sources contain magnetic systems with three solenoidal elements and annular separating electrodes, which are arranged in such a way that their axis of symmetry intersect the surface of the substrate on which the coating is formed at an angle less than 90 °, and the gas plasma source is made on the basis of helicon discharge and is located in such a way that its axis crosses the center of the substrate at an angle of 90 °. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2657671-C2 |
| priorityDate | 2013-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 |
Total number of triples: 14.